Invention Grant
- Patent Title: Seal ring structure, semiconductor die, and method for detecting cracks on semiconductor die
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Application No.: US16157274Application Date: 2018-10-11
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Publication No.: US10998274B2Publication Date: 2021-05-04
- Inventor: Chung-We Pan , Ching-Hung Fu , Kuo-Lung Fan
- Applicant: MEDIATEK INC.
- Applicant Address: TW Hsin-Chu
- Assignee: MEDIATEK INC.
- Current Assignee: MEDIATEK INC.
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/66 ; H01L21/765 ; H01L29/40 ; G01R31/28 ; G01R27/02 ; H01L23/522 ; H01L23/58

Abstract:
A seal ring structure is provided. The seal ring structure includes a seal ring on a semiconductor substrate. The seal ring includes a first interconnect element and a plurality of second interconnect elements. The first interconnect element is formed on a shallow trench isolation (STI) region and a first group of P-type doping regions over the semiconductor substrate. The second interconnect elements are formed below the first interconnect element and on a second group of P-type doping regions over the semiconductor substrate. The second interconnect elements are electrically separated from the first interconnect element, and the first and second groups of P-type doping regions are separated by the STI region.
Public/Granted literature
- US20190164911A1 SEAL RING STRUCTURE, SEMICONDUCTOR DIE, AND METHOD FOR DETECTING CRACKS ON SEMICONDUCTOR DIE Public/Granted day:2019-05-30
Information query
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