Invention Grant
- Patent Title: Sintered body and electrostatic chuck
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Application No.: US15616857Application Date: 2017-06-07
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Publication No.: US10998216B2Publication Date: 2021-05-04
- Inventor: Michio Horiuchi , Masakuni Miyazawa
- Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Applicant Address: JP Nagano
- Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
- Current Assignee Address: JP Nagano
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2016-115054 20160609
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/683 ; H01L21/67 ; C04B35/10 ; C04B41/00 ; C04B41/50 ; C04B41/87 ; C04B41/91

Abstract:
A sintered body includes a ceramic substrate including sintered oxide particles, a through-hole formed in the ceramic substrate such that the side surfaces of the oxide particles exposed from an inner wall of the through-hole form a flat surface, and a porous body disposed in the through-hole, the porous body including spherical oxide ceramic particles and a mixed oxide configured to bind the spherical oxide ceramic particles.
Public/Granted literature
- US20170358476A1 SINTERED BODY AND ELECTROSTATIC CHUCK Public/Granted day:2017-12-14
Information query
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