Invention Grant
- Patent Title: Reticle transportation container
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Application No.: US16876875Application Date: 2020-05-18
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Publication No.: US10998213B2Publication Date: 2021-05-04
- Inventor: Yu-Ching Lee , Yu-Piao Fang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; G03F7/20 ; G03F1/22 ; G03F1/66

Abstract:
A transportation container is provided with a container body constructed of a top wall, a bottom wall, a rear wall, and two sidewalls forming a front opening for loading or unloading a reticle pod into or out of the container body; a lid for opening and closing the front opening; and a lift plate above the container body configured to connect to a carrier of an overhead hoist transfer (OHT) system.
Public/Granted literature
- US20200279759A1 Reticle Transportation Container Public/Granted day:2020-09-03
Information query
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