Invention Grant
- Patent Title: Semiconductor package and manufacturing method thereof
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Application No.: US16527015Application Date: 2019-07-30
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Publication No.: US10998202B2Publication Date: 2021-05-04
- Inventor: Po-Han Wang , Hung-Jui Kuo , Yu-Hsiang Hu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/367 ; H01L23/538 ; H01L23/544 ; H01L23/00 ; H01L21/683 ; H01L21/48 ; H01L21/78 ; H01L23/31

Abstract:
A semiconductor package includes a die and an encapsulant. The die has an active surface and an opposite backside surface. The encapsulant wraps around the die and has a recess reaching the backside surface. A span of the recess differs from a span of the backside surface and a span of the encapsulant. A manufacturing method includes at least the following steps. A blanket die attach film is spin-coated. A light exposure process is performed to the blanket die attach film. Blanket die attach film is developed to form a patterned die adhesive. A die is disposed over the patterned die adhesive with a backside surface closer to the patterned die adhesive. The patterned die adhesive is cured to affix the die. The die and the cured die adhesive are encapsulated in an encapsulant. The cured die adhesive is removed.
Information query
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