- Patent Title: Structure and method for testing three-dimensional memory device
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Application No.: US16867287Application Date: 2020-05-05
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Publication No.: US10998079B2Publication Date: 2021-05-04
- Inventor: Jong Jun Kim , Feng Pan , Jong Seuk Lee , Zhenyu Lu , Yongna Li , Lidong Song , Youn Cheul Kim , Steve Weiyi Yang , Simon Shi-Ning Yang
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201710134368.0 20170308
- Main IPC: G11C29/00
- IPC: G11C29/00 ; G11C29/50 ; G11C29/48 ; H01L27/11526 ; H01L27/11573 ; G11C29/02 ; H01L21/768 ; H01L23/48 ; H01L23/528 ; H01L27/11548 ; H01L27/11556 ; H01L27/11575 ; H01L27/11582 ; H01L27/11578 ; G11C29/12 ; G11C29/56 ; H01L27/11551 ; G11C29/04

Abstract:
Embodiments of methods for testing three-dimensional memory devices are disclosed. The method can include: applying an input signal to a first conductive pad of the memory device by a first probe of a probe card; transmitting the input signal through the first conductive pad, a first TAC, a first interconnect structure passing through a bonding interface of the memory device, at least one of a memory array contact and a test circuit to a test structure; receiving an output signal through a second interconnect structure passing through the bonding interface, a second TAC, at least one of the memory array contact and the test circuit from the test structure; measuring the output signal from a second conductive pad of the memory device by a second probe of the probe card; and determining a characteristic of the test structure based on the input signal and the output signal.
Public/Granted literature
- US20200265913A1 STRUCTURE AND METHOD FOR TESTING THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2020-08-20
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