Invention Grant
- Patent Title: High accuracy pressure transducer with improved temperature stability
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Application No.: US16468292Application Date: 2017-12-21
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Publication No.: US10996124B2Publication Date: 2021-05-04
- Inventor: Rifat Kangi
- Applicant: TUBITAK
- Applicant Address: TR Ankara
- Assignee: TUBITAK
- Current Assignee: TUBITAK
- Current Assignee Address: TR Ankara
- Agency: Bayramoglu Law Offices LLC
- Priority: TR2016/19943 20161228
- International Application: PCT/IB2017/058276 WO 20171221
- International Announcement: WO2018/122698 WO 20180705
- Main IPC: G01L19/04
- IPC: G01L19/04 ; G01L9/12 ; G01L5/161 ; G01L19/00

Abstract:
A high accuracy capacitive pressure transducer capable of performing measurements at a fixed temperature, with stability better than ±2 mK, in the temperature range of 15° C.-30° C. and which does not require the use of correction for thermal transpiration effect. The pressure transducer includes a vacuum gauge having a pressure sensor and a pressure sensor sheath, a temperature control unit secured in a cap; an aluminum block having a lower surface in contact with the pressure sensor sheath and an upper surface in contact with a main plate; and a temperature sensor located between the main plate and the upper surface of the aluminum block. The vacuum gauge is connected to a vacuum system by means of a connecting pipe.
Public/Granted literature
- US20200080906A1 HIGH ACCURACY PRESSURE TRANSDUCER WITH IMPROVED TEMPERATURE STABILITY Public/Granted day:2020-03-12
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