• Patent Title: High accuracy pressure transducer with improved temperature stability
  • Application No.: US16468292
    Application Date: 2017-12-21
  • Publication No.: US10996124B2
    Publication Date: 2021-05-04
  • Inventor: Rifat Kangi
  • Applicant: TUBITAK
  • Applicant Address: TR Ankara
  • Assignee: TUBITAK
  • Current Assignee: TUBITAK
  • Current Assignee Address: TR Ankara
  • Agency: Bayramoglu Law Offices LLC
  • Priority: TR2016/19943 20161228
  • International Application: PCT/IB2017/058276 WO 20171221
  • International Announcement: WO2018/122698 WO 20180705
  • Main IPC: G01L19/04
  • IPC: G01L19/04 G01L9/12 G01L5/161 G01L19/00
High accuracy pressure transducer with improved temperature stability
Abstract:
A high accuracy capacitive pressure transducer capable of performing measurements at a fixed temperature, with stability better than ±2 mK, in the temperature range of 15° C.-30° C. and which does not require the use of correction for thermal transpiration effect. The pressure transducer includes a vacuum gauge having a pressure sensor and a pressure sensor sheath, a temperature control unit secured in a cap; an aluminum block having a lower surface in contact with the pressure sensor sheath and an upper surface in contact with a main plate; and a temperature sensor located between the main plate and the upper surface of the aluminum block. The vacuum gauge is connected to a vacuum system by means of a connecting pipe.
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