Invention Grant
- Patent Title: MEMS sensor
-
Application No.: US16463465Application Date: 2017-10-24
-
Publication No.: US10972059B2Publication Date: 2021-04-06
- Inventor: Thomas Froehlich , Mark Niederberger , Colin Steele , Rene Scheuner , Thomas Christen , Lukas Perktold , Duy-Dong Pham
- Applicant: ams International AG
- Applicant Address: CH Rapperswil
- Assignee: ams International AG
- Current Assignee: ams International AG
- Current Assignee Address: CH Rapperswil
- Agency: MH2 Technology Law Group LLP
- Priority: EP16201746 20161201
- International Application: PCT/EP2017/077127 WO 20171024
- International Announcement: WO2018/099655 WO 20180607
- Main IPC: H03F3/45
- IPC: H03F3/45 ; H04R3/00 ; H03F3/181

Abstract:
A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (I200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (I200a, I200b) of the differential amplifier (200) and is therefore rejected.
Public/Granted literature
- US20190356282A1 MEMS SENSOR Public/Granted day:2019-11-21
Information query