Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US16295762Application Date: 2019-03-07
-
Publication No.: US10971510B2Publication Date: 2021-04-06
- Inventor: Tetsu Morooka
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2018-175851 20180920
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11524 ; G11C16/04 ; H01L27/11551 ; H01L27/11578

Abstract:
According to one embodiment, a semiconductor memory device includes: a substrate; a plurality of wiring layers stacked via a plurality of insulating layers above the substrate, the wiring layers having an opening extending in a direction perpendicular to the substrate, each of the wiring layers including a first face recessed in a first direction, a second face recessed in a second direction, third face recessed in a third direction, and a fourth face recessed in a fourth direction; a block insulating film provided to be in contact with each of the first to fourth faces; a charge storage film provided on a side face of the block insulating film; a tunnel insulating film provided on a side face of the charge storage film; and a semiconductor film provided on a side face of the tunnel insulating film.
Public/Granted literature
- US20200098767A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-03-26
Information query
IPC分类: