Invention Grant
- Patent Title: Package power delivery using plane and shaped vias
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Application No.: US16526497Application Date: 2019-07-30
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Publication No.: US10971416B2Publication Date: 2021-04-06
- Inventor: Krishna Bharath , Mathew J. Manusharow , Adel A. Elsherbini , Mihir K. Roy , Aleksandar Aleksov , Yidnekachew S. Mekonnen , Javier Soto Gonzalez , Feras Eid , Suddhasattwa Nad , Meizi Jiao
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/12 ; H01L23/48 ; H01L21/48 ; H01L23/498

Abstract:
Embodiments of the invention include an electrical package and methods of forming the package. In one embodiment, the electrical package may include a first package layer. A plurality of signal lines with a first thickness may be formed on the first package layer. Additionally, a power plane with a second thickness may be formed on the first package layer. According to an embodiment, the second thickness is greater than the first thickness. Embodiments of the invention may form the power plane with a lithographic patterning and deposition process that is different than the lithographic patterning and deposition process used to form the plurality of signal lines. In an embodiment, the power plane may be formed concurrently with vias that electrically couple the signal lines to the next routing layer.
Public/Granted literature
- US20190355636A1 PACKAGE POWER DELIVERY USING PLANE AND SHAPED VIAS Public/Granted day:2019-11-21
Information query
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