Invention Grant
- Patent Title: Method and device for bonding substrates
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Application No.: US15992274Application Date: 2018-05-30
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Publication No.: US10971378B2Publication Date: 2021-04-06
- Inventor: Friedrich Paul Lindner
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
A method and corresponding device for bonding a first contact surface of a first substrate to a second contact surface of a second substrate. The method includes the steps of arranging a substrate stack, formed from the first substrate and the second substrate and aligned on the contact surfaces, between a first heating surface of a first heating system and a second heating surface of a second heating system.
Public/Granted literature
- US20180277403A1 METHOD AND DEVICE FOR BONDING SUBSTRATES Public/Granted day:2018-09-27
Information query
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