Invention Grant
- Patent Title: Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
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Application No.: US16448147Application Date: 2019-06-21
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Publication No.: US10971331B2Publication Date: 2021-04-06
- Inventor: Shinji Sakamoto , Kenichi Yasui , Chiaki Inaba , Hikaru Yamamura , Satoru Fukushima , Yoshinori Akahane
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-135232 20180718
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/302 ; H01J37/04 ; H01J37/147 ; H01J37/10

Abstract:
In one embodiment, a writing data generation method is for generating writing data used by a multi-charged particle beam writing apparatus. The writing data generation method includes referring to library data in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence, and representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.
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