Invention Grant
- Patent Title: Terahertz wave detection device and array sensor
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Application No.: US16095771Application Date: 2017-04-28
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Publication No.: US10969335B2Publication Date: 2021-04-06
- Inventor: Yukio Kawano , Daichi Suzuki
- Applicant: Tokyo Institute of Technology
- Applicant Address: JP Tokyo
- Assignee: Tokyo Institute of Technology
- Current Assignee: Tokyo Institute of Technology
- Current Assignee Address: JP Tokyo
- Agency: The Marbury Law Group, PLLC
- Priority: JPJP2016-091298 20160428
- International Application: PCT/JP2017/016947 WO 20170428
- International Announcement: WO2017/188438 WO 20171102
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G01J5/04 ; G01N21/35 ; H01L51/00 ; G01N21/3586

Abstract:
A terahertz wave detection device includes a low-dimensional electron system material formed on a substrate; and a first electrode and a second electrode opposingly arranged on a two-dimensional plane of the low-dimensional electron system material. The first electrode and the second electrode are made of metals having different thermal conductivity. An 8-element array sensor includes eight terahertz wave detection devices aligned in an array. The terahertz wave detection device includes carbon nanotube film; a first electrode disposed on one side of the carbon nanotube film; and a second electrode disposed on the other side of the carbon nanotube film. The first electrode and the second electrode have different thermal conductivity.
Public/Granted literature
- US20210010932A1 TERAHERTZ WAVE DETECTION DEVICE AND ARRAY SENSOR Public/Granted day:2021-01-14
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