- Patent Title: Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
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Application No.: US16309697Application Date: 2017-06-22
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Publication No.: US10969259B2Publication Date: 2021-04-06
- Inventor: Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JPJP2016-132948 20160705
- International Application: PCT/JP2017/023013 WO 20170622
- International Announcement: WO2018/008420 WO 20180111
- Main IPC: G01F1/42
- IPC: G01F1/42 ; G05D7/00 ; G01F15/00 ; G01F25/00 ; G01F1/36
Abstract:
In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
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