Invention Grant
- Patent Title: Fluid control device, recording medium recorded with control program, and control method
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Application No.: US16001890Application Date: 2018-06-06
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Publication No.: US10969019B2Publication Date: 2021-04-06
- Inventor: Tadahiro Yasuda , Thomas Hoke , Ryan Owens , Maximilian Gundlach , Patrick Lowery , John Dick , Tomohiro Yoshida
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JPJP2017-112705 20170607
- Main IPC: F16K1/54
- IPC: F16K1/54 ; F16K31/00 ; G05D7/06

Abstract:
Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.
Public/Granted literature
- US20180356845A1 FLUID CONTROL DEVICE, RECORDING MEDIUM RECORDED WITH CONTROL PROGRAM, AND CONTROL METHOD Public/Granted day:2018-12-13
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