Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US16530221Application Date: 2019-08-02
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Publication No.: US10943919B2Publication Date: 2021-03-09
- Inventor: Shigeki Kobayashi , Taro Shiokawa , Masahisa Sonoda
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-053449 20190320
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C5/06 ; H01L27/11524 ; H01L27/11565 ; H01L27/1157 ; H01L27/11519 ; H01L27/11556

Abstract:
A semiconductor memory device includes a plurality of first conductor layers that are stacked in a first direction; a first pillar including a first semiconductor layer and extending through the first conductor layers in the first direction; a first charge storage layer that is provided between the first conductor layers and the first semiconductor layer; a plurality of second conductor layers that are stacked in the first direction above an uppermost conductor layer of the first conductor layers; a second pillar including a second semiconductor layer and extending through the second conductor layers in the first direction, the second semiconductor layer electrically connected to the first semiconductor layer; and a conductor pillar or film extending in the first direction through the second conductor layers other than a lowermost layer of the second conductor layers and being in contact with a respective upper surface of each of the second conductor layers.
Public/Granted literature
- US20200303402A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2020-09-24
Information query
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