Invention Grant
- Patent Title: Tape affixing apparatus
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Application No.: US16564647Application Date: 2019-09-09
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Publication No.: US10943811B2Publication Date: 2021-03-09
- Inventor: Masahiro Wada , Hiroshi Yoshimura , Toshiyasu Rikiishi
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2018-173490 20180918
- Main IPC: B32B37/00
- IPC: B32B37/00 ; H01L21/683 ; H01L21/67

Abstract:
A tape affixing apparatus includes: a holding unit including a frame holding unit and a wafer holding portion; a feeding unit configured to feed a tape unit; a winding unit configured to wind a sheet from which a dicing tape is peeled off; a plate configured to be brought into contact with the sheet and peel the tape off from the sheet by bending the tape unit with the sheet on the inside; an affixing roller configured to affix the peeled-off tape to a frame and a wafer; and a nozzle configured to blow air so as to make the peeled-off tape conform to the affixing roller.
Public/Granted literature
- US20200090976A1 TAPE AFFIXING APPARATUS Public/Granted day:2020-03-19
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