Invention Grant

Thermal flowmeter
Abstract:
The present invention is directed to a thermal flowmeter that prevents erroneous detection of backflow by suppressing circulation of air flow from a flow detection unit side to a back side or from the back side to the flow detection unit side and measures a gas flow rate with high accuracy. A thermal flowmeter of the present invention includes a bypass passage through which a gas to be measured passes; a dividing portion which divides the inside of the bypass passage into a first passage portion and a second passage portion; and a flow detection unit which is provided on a surface of the dividing portion on the first passage portion side and detects a flow rate of the gas to be measured. Further, the first passage portion has a detection surface on which the flow detection unit is exposed, an opposing surface which opposes the flow detection unit on the detection surface, and non-opposing surfaces and which are disposed at positions deviating from the opposing surface in a bypass passage width direction of the first passage portion and do not oppose the flow detection unit, and the non-opposing surface is separated from the detection surface farther than the opposing surface.
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