Invention Grant
- Patent Title: Structured pedestal for MTJ containing devices
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Application No.: US16254021Application Date: 2019-01-22
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Publication No.: US10937945B2Publication Date: 2021-03-02
- Inventor: Nathan P. Marchack , Bruce B. Doris
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12

Abstract:
A magnetic tunnel junction (MTJ) containing device is provided that includes an undercut conductive pedestal structure having a concave sidewall positioned between a bottom electrode and a MTJ pillar. The geometric nature of such a conductive pedestal structure makes the pedestal structure unlikely to be resputtered and deposited on a sidewall of the MTJ pillar, especially the sidewall of the tunnel barrier of the MTJ pillar. Thus, electrical shorts caused by depositing resputtered conductive metal particles on the sidewall of the tunnel barrier of the MTJ pillar are substantially reduced.
Public/Granted literature
- US20200235286A1 STRUCTURED PEDESTAL FOR MTJ CONTAINING DEVICES Public/Granted day:2020-07-23
Information query
IPC分类: