Invention Grant
- Patent Title: Amorphous metal thin film nonlinear resistor
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Application No.: US16556157Application Date: 2019-08-29
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Publication No.: US10937687B2Publication Date: 2021-03-02
- Inventor: Sean William Muir
- Applicant: AMORPHYX, INC.
- Applicant Address: US OR Corvallis
- Assignee: AMORPHYX, INC.
- Current Assignee: AMORPHYX, INC.
- Current Assignee Address: US OR Corvallis
- Agency: Seed IP Law Group LLP
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532 ; G02F1/1343 ; H01L49/02 ; H01L27/12 ; H01L29/49 ; H01L21/3205 ; H01L29/786 ; G02F1/1362

Abstract:
Amorphous multi-component metallic films can be used to improve the performance of electronic components such as resistors, diodes, and thin film transistors. Interfacial properties of AMMFs are superior to those of crystalline metal films, and therefore electric fields at the interface of an AMMF and an oxide film are more uniform. An AMMF resistor (AMNR) can be constructed as a three-layer structure including an amorphous metal, a tunneling insulator, and a crystalline metal layer. By modifying the order of the materials, the patterns of the electrodes, and the size and number of overlap areas, the I-V performance characteristics of the AMNR are adjusted. A non-coplanar AMNR has a five-layer structure that includes three metal layers separated by metal oxide tunneling insulator layers, wherein an amorphous metal thin film material is used to fabricate the middle electrodes.
Public/Granted literature
- US10971392B2 Amorphous metal thin film nonlinear resistor Public/Granted day:2021-04-06
Information query
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