Invention Grant
- Patent Title: MEMS sensor for measuring at least one measured variable
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Application No.: US15771938Application Date: 2016-09-12
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Publication No.: US10935404B2Publication Date: 2021-03-02
- Inventor: Patrick Reith , Christof Huber , Hagen Feth
- Applicant: TrueDyne Sensors AG
- Applicant Address: CH Reinach
- Assignee: TrueDyne Sensors AG
- Current Assignee: TrueDyne Sensors AG
- Current Assignee Address: CH Reinach
- Agency: Endress+Hauser (USA) Holding Inc.
- Agent Kelly J. Smith
- Priority: DE102015118346.3 20151027
- International Application: PCT/EP2016/071397 WO 20160912
- International Announcement: WO2017/071864 WO 20170504
- Main IPC: G01F1/84
- IPC: G01F1/84 ; G01N9/36 ; G01N11/16

Abstract:
A MEMS sensor for measuring at least one measured variable, especially a density, a flow and/or a viscosity, a flowing fluid, is described, comprising: at least one microfluidic channel having a channel section excitable to execute oscillations; and an exciter system for exciting a desired oscillation mode, causing the channel section to execute oscillations in a predetermined plane of oscillation. The MEMS sensor has improved oscillation characteristics at least in part because the channel section is composed of an anisotropic material, having directionally dependent elasticity and which is spatially oriented such that a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section perpendicular to the plane of oscillation is greater than a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section in the plane of oscillation.
Public/Granted literature
- US20180348033A1 MEMS SENSOR FOR MEASURING AT LEAST ONE MEASURED VARIABLE Public/Granted day:2018-12-06
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