Invention Grant
- Patent Title: Fabrication method for fin-based semiconductor device
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Application No.: US16118010Application Date: 2018-08-30
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Publication No.: US10916479B2Publication Date: 2021-02-09
- Inventor: Fei Zhou
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , SMIC New Technology Research and Development (Shanghai) Corporation
- Applicant Address: CN Shanghai; CN Shanghai
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,SMIC New Technology Research and Development (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,SMIC New Technology Research and Development (Shanghai) Corporation
- Current Assignee Address: CN Shanghai; CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201711186310 20171123
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/8238 ; H01L21/762 ; H01L29/66 ; H01L21/3065 ; H01L21/3213 ; H01L21/28 ; H01L21/8234

Abstract:
Semiconductor device and fabrication method are provided. The method includes: providing a semiconductor substrate; forming initial fins on the semiconductor substrate; forming a gate structure material layer on the semiconductor substrate and the initial fins, the gate material layer having a top surface higher than the initial fins; forming a trench in the gate structure material layer and the initial fins, which passes through the initial fins along a direction perpendicular to an extending direction of initial fins and in parallel with a surface of the semiconductor substrate to form initial fins into fins; forming an isolation layer in the trench having a top surface higher than the fins; and forming gate structures on both sides of the isolation layer by etching the gate structure material layer.
Public/Granted literature
- US20190157136A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2019-05-23
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