Invention Grant
- Patent Title: Pyroelectric sensor
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Application No.: US16566643Application Date: 2019-09-10
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Publication No.: US10914638B2Publication Date: 2021-02-09
- Inventor: Takamichi Fujii
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2017-052936 20170317
- Main IPC: G01J5/34
- IPC: G01J5/34 ; G01J1/04 ; G01J5/08 ; H01L41/187

Abstract:
Provided is a pyroelectric sensor including: an Si substrate; a laminated portion in which a heat absorption layer formed of an inorganic material, a lower electrode, a piezoelectric film, and an upper electrode are laminated in this order from one surface side of the Si substrate on the one surface; and an optical filter that is provided at a position of the other surface of the Si substrate corresponding to the laminated portion and selectively transmits an infrared ray, in which an infrared ray incident to the laminated portion from the optical filter side through the Si substrate is sensed.
Public/Granted literature
- US20200003627A1 PYROELECTRIC SENSOR Public/Granted day:2020-01-02
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