Invention Grant
- Patent Title: Arc evaporation source
-
Application No.: US15321227Application Date: 2015-07-03
-
Publication No.: US10913997B2Publication Date: 2021-02-09
- Inventor: Yoshinori Kurokawa , Satoshi Hirota , Shinichi Tanifuji
- Applicant: Kobe Steel, Ltd.
- Applicant Address: JP Hyogo
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Hyogo
- Agency: Studebaker & Brackett PC
- Priority: JP2014-154722 20140730,JP2015-036107 20150226
- International Application: PCT/JP2015/069340 WO 20150703
- International Announcement: WO2016/017374 WO 20160204
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/32 ; H01J37/32

Abstract:
Provided is an arc evaporation source capable of stably retaining an arc spot on the front end surface of a target and apparatus downsizing. An arc evaporation source includes a target to be melted and vaporized from its front end surface by arc discharge and at least one magnet disposed apart from a side surface of the target radially thereof. The magnet is disposed to form a magnetic field satisfying conditions a) and b) below, on the side surface, in a region of up to 10 mm from the front end surface axially of the target: a) an angle which magnetic lines of force forms with the side surface of the target is 45 degrees or less; and b) a component of the strength of the magnetic lines of force along the axial direction of the target is 200 G or more.
Public/Granted literature
- US20170204507A1 ARC EVAPORATION SOURCE Public/Granted day:2017-07-20
Information query
IPC分类: