Invention Grant
- Patent Title: FinFET device with asymmetrical drain/source feature
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Application No.: US16898768Application Date: 2020-06-11
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Publication No.: US10910496B2Publication Date: 2021-02-02
- Inventor: Wei-Yang Lo , Tung-Wen Cheng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/08 ; H01L21/8238 ; H01L27/092 ; H01L27/11

Abstract:
A semiconductor device includes a fin-like structure extending along a first axis; a first source/drain feature disposed at a first end portion of the fin-like structure; and a constraint layer disposed at a first side of the first end portion of the fin-like structure, wherein the first source/drain feature comprises a first portion, disposed at the first side, the first portion comprising a shorter extended width along a second axis, and a second portion, disposed at a second side that is opposite to the first side, the second portion comprising a longer extended width along the second axis.
Public/Granted literature
- US20200303552A1 FINFET DEVICE WITH ASYMMETRICAL DRAIN/SOURCE FEATURE Public/Granted day:2020-09-24
Information query
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