Invention Grant
- Patent Title: Method for transferring and placing a semiconductor device on a substrate
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Application No.: US15836634Application Date: 2017-12-08
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Publication No.: US10910342B2Publication Date: 2021-02-02
- Inventor: Maria Op de Beeck , Bjorn Vandecasteele
- Applicant: IMEC VZW , Universiteit Gent
- Applicant Address: BE Leuven; BE Ghent
- Assignee: IMEC VZW,Universiteit Gent
- Current Assignee: IMEC VZW,Universiteit Gent
- Current Assignee Address: BE Leuven; BE Ghent
- Agency: Mcdonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP16202839 20161208
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683 ; H01L29/06 ; H01L23/544

Abstract:
An example embodiment may include a method for placing on a carrier substrate a semiconductor device. The method may include providing a semiconductor substrate comprising a rectangular shaped assist chip, which may include at least one semiconductor device surrounded by a metal-free border. The method may also include dicing the semiconductor substrate to singulate the rectangular shaped assist chip. The method may further include providing a carrier substrate having adhesive thereon. The method may additionally include transferring to and placing on the carrier substrate the rectangular shaped assist chip, thereby contacting the adhesive with the rectangular shaped assist chip at least at a location of the semiconductor device. The method may finally include singulating the semiconductor device, while remaining attached to the carrier substrate by the adhesive, by removing a part of rectangular shaped assist chip other than the semiconductor device.
Public/Granted literature
- US20180166416A1 Method for Transferring and Placing a Semiconductor Device on a Substrate Public/Granted day:2018-06-14
Information query
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