Invention Grant
- Patent Title: Substrate container, load port apparatus, and substrate treating apparatus
-
Application No.: US15508688Application Date: 2015-07-28
-
Publication No.: US10910247B2Publication Date: 2021-02-02
- Inventor: Kazuhiro Honsho , Mitsukazu Takahashi , Akito Hatano , Koji Hashimoto
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JP2014-181104 20140905
- International Application: PCT/JP2015/071408 WO 20150728
- International Announcement: WO2016/035480 WO 20160310
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; B65D43/02 ; B65D85/30

Abstract:
A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.
Public/Granted literature
- US20170263479A1 SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING APPARATUS Public/Granted day:2017-09-14
Information query
IPC分类: