Invention Grant
- Patent Title: Wafer producing apparatus and carrying tray
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Application No.: US16209285Application Date: 2018-12-04
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Publication No.: US10910241B2Publication Date: 2021-02-02
- Inventor: Kentaro Iizuka , Naoki Omiya
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2017-237948 20171212
- Main IPC: B23K26/53
- IPC: B23K26/53 ; B23K26/38 ; B23K26/08 ; H01L21/673 ; H01L21/677 ; H01L21/304 ; B28D5/00 ; B24B7/22 ; H01L21/67 ; B23K26/00 ; B24B27/00 ; B23K103/00

Abstract:
A wafer producing apparatus includes: an ingot grinding unit configured to grind and planarize an upper surface of an ingot held by a first holding table; a laser applying unit configured to apply a laser beam of such a wavelength as to be transmitted through the ingot to the ingot, with a focal point of the laser beam positioned at a depth corresponding to the thickness of a wafer to be produced from an upper surface of the ingot held by a second holding table, to form a peel-off layer; a wafer peeling unit configured to hold the upper surface of the ingot held by a third holding table and peel off the wafer from the peel-off layer; and a carrying tray having an ingot support section configured to support the ingot and a wafer support section configured to support the wafer.
Public/Granted literature
- US20190181024A1 WAFER PRODUCING APPARATUS AND CARRYING TRAY Public/Granted day:2019-06-13
Information query
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