• Patent Title: Front-side type image sensor and method for manufacturing such a sensor
  • Application No.: US16340879
    Application Date: 2017-10-10
  • Publication No.: US10903263B2
    Publication Date: 2021-01-26
  • Inventor: Walter Schwarzenbach
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1659763 20161010
  • International Application: PCT/EP2017/075797 WO 20171010
  • International Announcement: WO2018/069310 WO 20180419
  • Main IPC: H01L27/146
  • IPC: H01L27/146 H01L21/762
Front-side type image sensor and method for manufacturing such a sensor
Abstract:
A front-side type image sensor includes a substrate successively comprising a P− type doped semiconducting support substrate, an electrically insulating layer and a semiconducting active layer, and a matrix array of photodiodes in the active layer of the substrate, wherein the substrate comprises, between the support substrate and the electrically insulating layer, a P+ type doped semiconducting epitaxial layer A method of forming such a structure includes epitaxially growing a P+ type doped semiconducting layer on a P− type doped semiconducting support substrate, providing an electrically insulating layer and an active layer over the P+ type doped semiconducting layer, and forming photodiodes in the active layer.
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