Invention Grant
- Patent Title: Front-side type image sensor and method for manufacturing such a sensor
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Application No.: US16340879Application Date: 2017-10-10
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Publication No.: US10903263B2Publication Date: 2021-01-26
- Inventor: Walter Schwarzenbach
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1659763 20161010
- International Application: PCT/EP2017/075797 WO 20171010
- International Announcement: WO2018/069310 WO 20180419
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/762

Abstract:
A front-side type image sensor includes a substrate successively comprising a P− type doped semiconducting support substrate, an electrically insulating layer and a semiconducting active layer, and a matrix array of photodiodes in the active layer of the substrate, wherein the substrate comprises, between the support substrate and the electrically insulating layer, a P+ type doped semiconducting epitaxial layer A method of forming such a structure includes epitaxially growing a P+ type doped semiconducting layer on a P− type doped semiconducting support substrate, providing an electrically insulating layer and an active layer over the P+ type doped semiconducting layer, and forming photodiodes in the active layer.
Public/Granted literature
- US20190267425A1 FRONT-SIDE TYPE IMAGE SENSOR AND METHOD FOR MANUFACTURING SUCH A SENSOR Public/Granted day:2019-08-29
Information query
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