A transient voltage suppressor (TVS) device uses a punch-through silicon controlled rectifier (SCR) structure for the high-side steering diode and/or the low-side steering diode where the punch-through SCR structure realizes low capacitance at the protected node. In some embodiments, the breakdown voltage of the TVS device is tailored by connecting two or more forward biased diodes in series. The low capacitance TVS device can be configured for unidirectional or bidirectional applications. In some embodiments, the TVS device includes a MOS-triggered silicon controlled rectifier as the high-side steering diode. The breakdown voltage of the TVS device can be adjusted by adjusting the threshold voltage of the MOS transistor.