Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16124548Application Date: 2018-09-07
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Publication No.: US10825771B2Publication Date: 2020-11-03
- Inventor: Nobuyuki Toda , Takeshi Yamamoto , Shinji Kawahara , Kazuaki Yamaura , Takashi Ishikawa
- Applicant: Kabushiki Kaisha Toshiba , Toshiba Electronic Devices & Storage Corporation
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: White & Case LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@58bd3c12
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L21/30

Abstract:
A semiconductor device includes a semiconductor substrate, an insulating film provided on the semiconductor substrate, a first element disposed at least in a lower layer portion of the insulating film, a second element disposed at least in the lower layer portion of the insulating film, and a hydrogen barrier member provided on the semiconductor substrate. The hydrogen barrier member is made from a material transmitting hydrogen less easily than does a material of the insulating film. The hydrogen barrier member and the semiconductor substrate surround the second element. The hydrogen barrier member does not surround the first element.
Public/Granted literature
- US20190287917A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-09-19
Information query
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