Invention Grant
- Patent Title: Substrate treatment apparatus
-
Application No.: US15692018Application Date: 2017-09-13
-
Publication No.: US10821483B2Publication Date: 2020-11-03
- Inventor: Wataru Yano , Akio Hashizume
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@860bfd1
- Main IPC: B08B1/04
- IPC: B08B1/04 ; H01L21/02 ; A46B5/00 ; A46B9/00 ; A46B13/04 ; A46B15/00 ; B08B1/00 ; B08B3/08 ; H01L21/67 ; H01L21/687

Abstract:
A substrate treatment apparatus includes a brush moving mechanism which moves a shaft to which a cleaning brush is attached. The brush body includes a substrate contact portion of a pillar-shaped portion. The substrate treatment apparatus further includes a correcting member and a relatively-positioning mechanism. When the correcting member is placed in a target position, a contact portion of the correcting member overlaps an object portion which is a combination of a design contact portion and a belt-shaped annular portion in an outer surface of a design pillar-shaped portion of a design body of a design brush. The contact portion is formed to have an inverted shape of the object portion of the design brush, and a portion of the contact portion, which corresponds to the belt-shaped annular portion, is a center-axis facing surface which faces a center axis of the shaft.
Public/Granted literature
- US20180078973A1 SUBSTRATE TREATMENT APPARATUS Public/Granted day:2018-03-22
Information query
IPC分类: