Invention Grant
- Patent Title: Boron segregation in magnetic tunnel junctions
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Application No.: US16242555Application Date: 2019-01-08
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Publication No.: US10804458B2Publication Date: 2020-10-13
- Inventor: Guohan Hu , Younghyun Kim , Chandrasekara Kothandaraman , Jeong-Heon Park
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , SAMSUNG ELECTRONICS, CO., LTD.
- Applicant Address: US NY Armonk KR
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,SAMSUNG ELECTRONICS, CO., LTD.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,SAMSUNG ELECTRONICS, CO., LTD.
- Current Assignee Address: US NY Armonk KR
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L27/22 ; H01L43/10 ; H01L43/12 ; H01L43/02

Abstract:
Memory devices and methods of forming the same include forming a memory stack over a bottom electrode. The memory stack has a free magnetic layer formed on the tunnel barrier layer. A first boron-segregating layer is formed directly on the free magnetic layer. An anneal is performed to cause boron to leave the free magnetic layer at an interface with the first boron-segregating layer. A top electrode is formed over the memory stack.
Public/Granted literature
- US20190140165A1 BORON SEGREGATION IN MAGNETIC TUNNEL JUNCTIONS Public/Granted day:2019-05-09
Information query
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