Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16109386Application Date: 2018-08-22
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Publication No.: US10804285B2Publication Date: 2020-10-13
- Inventor: Ken Komiya
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1c3c3033
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L23/528 ; H01L27/11519 ; H01L27/11556 ; H01L29/10 ; H01L27/1157 ; H01L21/02 ; H01L23/532 ; H01L29/788 ; H01L29/792 ; H01L29/51 ; H01L21/311 ; H01L21/28

Abstract:
A semiconductor device includes a first stacked body comprising first conductive layers and first insulating layers interposed therebetween, a first columnar portion comprising a first semiconductor layer extending in the first stacked body in the first direction and a first memory layer between the first semiconductor layer and the first conductive layers, a second stacked body comprising second conductive layers and second insulating layers interposed therebetween, and a second columnar portion comprising a second semiconductor layer extending in the second stacked body in the first direction and a second memory layer between the second semiconductor layer and the second conductive layers. The first columnar portion has a first diameter, and the second columnar portion has a second diameter, and each of the plurality of first conductive layers has a first film thickness, and each of the plurality of second conductive layers has a second film thickness.
Public/Granted literature
- US20190198521A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-06-27
Information query
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