Invention Grant
- Patent Title: Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
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Application No.: US16033573Application Date: 2018-07-12
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Publication No.: US10771040B2Publication Date: 2020-09-08
- Inventor: Fadi Alsaleem , Mohammad H. Hasan
- Applicant: NUtech Ventures
- Applicant Address: US NE Lincoln
- Assignee: NUtech Ventures
- Current Assignee: NUtech Ventures
- Current Assignee Address: US NE Lincoln
- Agency: Leydig, Voit & Mayer, Ltd.
- Agent Gerald T. Gray
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/02 ; B81B7/02 ; G02B6/35 ; H03H3/007 ; B81B3/00

Abstract:
Systems and methods to amplify the response of a MEMS micro-oscillator by driving the MEMS device at its electrical and mechanical resonance frequencies, simultaneously. This enhances the MEMS mechanical sensitivity to electrical excitation and increases the voltage across the MEMS capacitor. Moreover, using a combination of two input signals at different frequencies (beat signal) may be used to achieve double resonance in any MEMS device, even if its natural frequency is far from its electrical resonance.
Public/Granted literature
- US20190020326A1 SYSTEMS AND METHODS FOR REDUCING THE ACTUATION VOLTAGE FOR ELECTROSTATIC MEMS DEVICES Public/Granted day:2019-01-17
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