- Patent Title: RF heating system with phase detection for impedance network tuning
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Application No.: US15816802Application Date: 2017-11-17
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Publication No.: US10771036B2Publication Date: 2020-09-08
- Inventor: Lionel Mongin , Pierre Marie Jean Piel , James Eric Scott
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H03H7/40
- IPC: H03H7/40 ; H05B6/50 ; H05B6/54 ; H05B6/70

Abstract:
A system and method for tuning an impedance network of a device is provided. An RF signal is provided through a transmission path connected to an impedance matching network that includes a first variable component and a second variable component. A phase angle between a forward signal and a reflected signal along the transmission path is determined. Based on the phase angle between the forward signal and the reflected signal, the first variable component is modified to improve an impedance match between the RF signal source and the electrode. After modifying the first variable component, a ratio of a power of the reflected signal to a power of the forward signal is determined, and an inductance of the second variable component is modified to reduce the ratio of a power of the reflected signal to a power of the forward signal.
Public/Granted literature
- US20190158055A1 RF HEATING SYSTEM WITH PHASE DETECTION FOR IMPEDANCE NETWORK TUNING Public/Granted day:2019-05-23
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