Invention Grant
- Patent Title: Method for manufacturing phase change memory
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Application No.: US16136464Application Date: 2018-09-20
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Publication No.: US10770656B2Publication Date: 2020-09-08
- Inventor: Gloria Wing Yun Fraczak , Matthew Brightsky , Chung Hon Lam , Fabio Carta , Robert Bruce , Takeshi Masuda , Koukou Suu
- Applicant: International Business Machines Corporation , ULVAC Technologies, Inc.
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Paterson + Sheridan, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
Method(s) and apparatuses for forming a phase change memory. A method includes: forming a crystalline phase-change layer at a first position in along a surface of a first semiconductor layer, and forming an amorphous phase-change layer at a second position along the surface of a second semiconductor layer, wherein the crystalline phase-change layer and the amorphous phase-change layer are in contact.
Public/Granted literature
- US20200098986A1 METHOD FOR MANUFACTURING PHASE CHANGE MEMORY Public/Granted day:2020-03-26
Information query
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