Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US16785074Application Date: 2020-02-07
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Publication No.: US10770583B2Publication Date: 2020-09-08
- Inventor: Kengo Omori
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agent Gregory M. Howison
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@57e44419 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3187138 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@a9a5e05
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L21/265 ; H01L29/417 ; H01L29/66 ; H01L29/10 ; H01L29/06 ; H01L29/423

Abstract:
A wide band gap semiconductor device includes a semiconductor layer, a trench formed in the semiconductor layer, first, second, and third regions having particular conductivity types and defining sides of the trench, and a first electrode embedded inside an insulating film in the trench. The second region integrally includes a first portion arranged closer to a first surface of the semiconductor layer than to a bottom surface of the trench, and a second portion projecting from the first portion toward a second surface of the semiconductor layer to a depth below a bottom surface of the trench. The second portion of the second region defines a boundary surface with the third region, the boundary region being at an incline with respect to the first surface of the semiconductor layer.
Public/Granted literature
- US20200176598A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-06-04
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