Micro-mechanical sensor element of angular velocity
Abstract:
A sensor element, for detecting angular velocity about a detection axis perpendicular to a plane of the sensor element, comprises two primary masses and two Coriolis masses, and two sensing cells. Two coupling levers are each coupled to the two primary masses by first springs and to one of the two Coriolis masses by second springs. The coupling levers enable the primary masses and Coriolis masses to be excited into a combined primary motion in the plane of the planar sensor element. In the primary motion, a direction of angular momenta of linear primary oscillation motions of the primary masses and angular momenta of rotational primary motions of the coupling levers with respect to the geometrical centroid of the sensor element is opposite to the direction of the angular momenta of linear primary oscillation motions of the Coriolis masses with respect to the geometrical centroid of the sensor element.
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