Methods and systems for controllably moving one or more moveable stages in a displacement device
Abstract:
Aspects of the invention provide methods and systems for moving moveable stages relative to a stator. A stator is operationally divided into multiple stator tiles. The movement of the one or more moveable stages is controlled by a plurality of controllers (each assigned particular control responsibilities). A controller is provided for each stator sector, where each stator sector comprises a group of one or more stator tiles. Controllers from neighboring sectors share various information to facilitate controllable movement of one or more moveable stages relative to the stator.
Information query
Patent Agency Ranking
0/0