Invention Grant
- Patent Title: Sealing cell and method for encapsulating a microelectronic component with such a sealing cell
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Application No.: US15960020Application Date: 2018-04-23
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Publication No.: US10763468B2Publication Date: 2020-09-01
- Inventor: Messaoud Bedjaoui , Jean Brun , Johnny Amiran
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7deb40e1
- Main IPC: H01M2/08
- IPC: H01M2/08 ; H01M10/052 ; H01M2/04 ; H01M2/06 ; H01L21/50 ; H01L23/10

Abstract:
Sealing cell for encapsulating a microelectronic component arranged on a substrate, with a cap, said sealing cell including: a bottom including a receiving zone for the substrate and a peripheral zone surrounding the receiving zone, a side wall formed of an internal face, an external face and an upper face, the upper face being configured to support the cap facing the receiving zone, an opening, arranged in the bottom of the cell, in the side wall, or in the cap, the opening being configured to be connected to a pumping system, in such a way as to be able to place under controlled atmosphere a cavity delimited by the side wall, the bottom and the cap.
Public/Granted literature
- US20180309097A1 SEALING CELL AND METHOD FOR ENCAPSULATING A MICROELECTRONIC COMPONENT WITH SUCH A SEALING CELL Public/Granted day:2018-10-25
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