Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16284658Application Date: 2019-02-25
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Publication No.: US10763353B2Publication Date: 2020-09-01
- Inventor: Yusuke Kobayashi , Naoyuki Ohse
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@45bcf5e4
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/47 ; H01L29/808 ; H01L29/16

Abstract:
A first p+-type region in contact with a bottom of a gate trench is disposed in a striped shape extending along a first direction that is orthogonal to a second direction along which the gate trench extends in a striped shape, as viewed from a front surface of a silicon carbide substrate. As a result, trench gate MOSFETs are disposed in parallel at a predetermined cell pitch along the first direction. A flat SBD is disposed at a predetermined cell pitch along the second direction. The cell pitch of the trench gate MOSFET and the cell pitch of the flat SBD may be set independently of each other.
Public/Granted literature
- US20190280118A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-09-12
Information query
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