Invention Grant
- Patent Title: Semiconductor structure and method of forming the same
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Application No.: US15960238Application Date: 2018-04-23
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Publication No.: US10763304B2Publication Date: 2020-09-01
- Inventor: Chern-Yow Hsu , Yuan-Tai Tseng , Shih-Chang Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L23/522 ; H01L27/22 ; H01L43/12

Abstract:
The present disclosure provides a semiconductor structure, including a memory region and a logic region adjacent to the memory region. The memory region includes a first Nth metal line, a first stop layer being disposed over a magnetic tunneling junction (MTJ) over the first Nth metal line, and a first (N+1)th metal via being disposed over the MTJ and surrounded by the first stop layer, the first (N+1)th metal via having a first height. The logic region includes a second Nth metal line, a second stop layer being disposed over an (N+1)th metal line, and a second (N+1)th metal via over the (N+1)th metal line and having a second height. N is an integer greater than or equal to 1 and the first height is greater than the second height. A method of manufacturing the semiconductor structure is also disclosed.
Public/Granted literature
- US20180374895A1 SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME Public/Granted day:2018-12-27
Information query
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