- Patent Title: Method for forming an integrated circuit and an integrated circuit
-
Application No.: US15964702Application Date: 2018-04-27
-
Publication No.: US10763270B2Publication Date: 2020-09-01
- Inventor: Tzu-Yu Chen , Kuo-Chi Tu , Wen-Ting Chu , Yong-Shiuan Tsair
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/11507
- IPC: H01L27/11507 ; H01L27/11509 ; H01L21/311 ; H01L29/66 ; H01L21/762 ; H01L29/78 ; H01L29/06 ; H01L21/266 ; H01L21/321 ; H01L29/51 ; H01L21/3105 ; H01L29/08 ; H01L21/265

Abstract:
A method for forming an integrated circuit (IC) and an IC are disclosed. The method for forming the IC includes: forming an isolation structure separating a memory semiconductor region from a logic semiconductor region; forming a memory cell structure on the memory semiconductor region; forming a memory capping layer covering the memory cell structure and the logic semiconductor region; performing a first etch into the memory capping layer to remove the memory capping layer from the logic semiconductor region, and to define a slanted, logic-facing sidewall on the isolation structure; forming a logic device structure on the logic semiconductor region; and performing a second etch into the memory capping layer to remove the memory capping layer from the memory semiconductor, while leaving a dummy segment of the memory capping layer that defines the logic-facing sidewall.
Public/Granted literature
- US20190333920A1 METHOD FOR INTEGRATING MEMORY AND LOGIC Public/Granted day:2019-10-31
Information query
IPC分类: