Invention Grant
- Patent Title: Batch bonding apparatus and bonding method
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Application No.: US16338551Application Date: 2017-09-26
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Publication No.: US10763235B2Publication Date: 2020-09-01
- Inventor: Xiaoyu Jiang , Hai Xia , Feibiao Chen , Song Guo
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@76ff5274
- International Application: PCT/CN2017/103330 WO 20170926
- International Announcement: WO2018/059373 WO 20180405
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/67 ; H01L23/544

Abstract:
A batch bonding apparatus and bonding method. The bonding apparatus comprises: a chip supply unit (10) for providing a chip (60) to be bonded; a substrate supply unit (20) for providing a substrate; a transfer unit (40) for transferring the chip (60) between the chip supply unit (10) and the substrate supply unit (20); and a pickup unit (30) disposed above the chip supply unit (10), for picking up the chip (60) from the chip supply unit (10) and uploading the chip (60) to the transfer unit (40) after flipping a marked surface of the chip (60) in a required direction. In the present invention pickup of each chip is completed individually, but transfer processes and bonding processes can be carried out for multiple chips at the same time, greatly increasing yield.
Public/Granted literature
- US20190385972A1 BATCH BONDING APPARATUS AND BONDING METHOD Public/Granted day:2019-12-19
Information query
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