Invention Grant
- Patent Title: Boron-containing compounds, compositions, and methods for the deposition of a boron containing films
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Application No.: US15079585Application Date: 2016-03-24
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Publication No.: US10763103B2Publication Date: 2020-09-01
- Inventor: Xinjian Lei , Moo-Sung Kim
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent David K. Benson
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C07F5/02 ; C23C16/455 ; C07F5/05 ; C23C16/34 ; H01L29/16
Abstract:
Described herein are boron-containing precursor compounds, and compositions and methods comprising same, for forming boron-containing films. In one aspect, the film is deposited from at least one precursor having the following Formula I or II described herein.
Public/Granted literature
- US20160293410A1 BORON-CONTAINING COMPOUNDS, COMPOSITIONS, AND METHODS FOR THE DEPOSITION OF A BORON CONTAINING FILMS Public/Granted day:2016-10-06
Information query
IPC分类:
