Invention Grant
- Patent Title: Memory arrays and methods of forming the same
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Application No.: US16174318Application Date: 2018-10-30
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Publication No.: US10762966B2Publication Date: 2020-09-01
- Inventor: Xinshu Cai , Shyue Seng Tan , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Viering Jentschura & Partner mBB
- Main IPC: G11C11/34
- IPC: G11C11/34 ; G11C16/10 ; G11C16/14 ; G11C16/04 ; H01L27/11521

Abstract:
A device having at least one memory cell over a substrate is provided. The at least one memory cell includes a source region and a drain region in the substrate, and a first gate and a second gate over the substrate. The first and second gates are arranged between the source region and the drain region. The first and second gate are separated by an intergate dielectric. The first gate is configured as a select gate and erase gate of the at least one memory cell, and the second gate is configured as a storage gate of the at least one memory cell. The second gate comprises a floating gate and a control gate over the floating gate. The device further includes source/drain (S/D) contacts extending from the source region and the drain region. The source region and the drain region are coupled to either one of a source line (SL) or a bit line (BL) through the S/D contacts.
Public/Granted literature
- US20200135275A1 MEMORY ARRAYS AND METHODS OF FORMING THE SAME Public/Granted day:2020-04-30
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