Invention Grant
- Patent Title: Projection exposure method and projection exposure apparatus for microlithography
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Application No.: US16688158Application Date: 2019-11-19
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Publication No.: US10761429B2Publication Date: 2020-09-01
- Inventor: Alexander Wolf
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@448d8563
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
A projection exposure method and apparatus are disclosed for exposing a radiation-sensitive substrate with at least one image of a pattern of a mask under the control of an operating control system of a projection exposure apparatus, part of the pattern lying in an illumination region is imaged onto the image field on the substrate with the aid of a projection lens, wherein all rays of the projection radiation contributing to the image generation in the image field form a projection beam path.
Public/Granted literature
- US20200089127A1 PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY Public/Granted day:2020-03-19
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