Invention Grant
- Patent Title: Device for swiveling a mirror element with two degrees of swiveling freedom
-
Application No.: US15692956Application Date: 2017-08-31
-
Publication No.: US10761317B2Publication Date: 2020-09-01
- Inventor: Markus Hauf , Yanko Sarov
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@51876e3e
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/08 ; G02B19/00 ; G01C9/06 ; H02N1/00 ; G01D5/241 ; G02B26/10
Abstract:
A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.
Public/Granted literature
- US20170363861A1 DEVICE FOR SWIVELING A MIRROR ELEMENT WITH TWO DEGREES OF SWIVELING FREEDOM Public/Granted day:2017-12-21
Information query
IPC分类:
