Wafer probe card for evaluating micro light emitting diodes, analysis apparatus including the same, and method of fabricating the wafer probe card
Abstract:
Provided are a wafer probe card that matches in one-to-one correspondence with an LED wafer by implementing a probe system having the same size as the LED wafer, and inspects brightness and wavelength of light emitted from a plurality of LEDs provided on the LED wafer at once by controlling the plurality of LEDs to emit light, an analysis apparatus including the same, and a method of fabricating the wafer probe card.
Information query
Patent Agency Ranking
0/0