Invention Grant
- Patent Title: Thin film diamond coating system and method
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Application No.: US15673381Application Date: 2017-08-09
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Publication No.: US10760157B2Publication Date: 2020-09-01
- Inventor: Adam Khan , Robert Polak
- Applicant: Adam Khan , Robert Polak
- Applicant Address: US IL Gurnee
- Assignee: AKHAN Semiconductor, Inc.
- Current Assignee: AKHAN Semiconductor, Inc.
- Current Assignee Address: US IL Gurnee
- Agency: The Thompson Law Office, P.C.
- Agent Lawrence E. Thompson
- Main IPC: C23C16/27
- IPC: C23C16/27 ; C03C17/245 ; C03C17/22

Abstract:
Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added. Further disclosed is a method of fabricating transparent glass that includes the steps of seeding an optical grade silicon substrate and forming a nanocrystalline diamond film on the silicon substrate using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.
Public/Granted literature
- US20180127871A1 THIN FILM DIAMOND COATING SYSTEM AND METHOD Public/Granted day:2018-05-10
Information query
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